MEMS Oscillators

A Micro-electromechanical System (MEMS) Oscillator is a type of oscillator that contains an electromechanical resonating structure built using a semiconductor fabrication process.  These devices operate similarly to crystal oscillators by utilizing a mechanical structure with an inherent resonant frequency that can oscillate by electrostatic or piezoelectric forces.  A MEMS structure can be made much smaller than a crystal, enabling higher resonant frequencies.  However, MEMS oscillators require supporting circuitry to compensate for process variation.  As MEMS processing techniques advance, the performance and price point of this class of oscillators should continue to improve.